SEALING STRUCTURE OF MICRO ELECTRONIC MECHANICAL SYSTEM, SEALING METHOD THEREFOR, AND MICRO ELECTRONIC MECHANICAL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a sealing structure of a micro electronic mechanical system capable of protect by individually and excellently sealing a movable part of the micro electronic mechanical system(MEMS).;SOLUTION: In the sealing structure of a micro electronic mechanical system which seals a micro electronic mechanical structure 2 formed on a substrate 1 in the space between the substrate 1 and a sealing member 3 formed on the substrate 1 so as to cover the micro electronic mechanical system 2, the sealing member 3 is composed of a first sealing member 4 placed on the space side and having a through hole 4a and a second sealing member 5 placed on the outside of the sealing member 4 and closing the through hole 4a. The micro electronic mechanical structure 2 and the sealing structure can be formed through a series of processes. The sealing structure can be formed on an extremely local part of the micro electronic mechanical structure 2 and the periphery. Consequently, an extremely small micro electronic mechanical system can be provided by the sealing structure excellent in mass production effect.;COPYRIGHT: (C)2005,JPO&NCIPI