DEFECT CONCENTRATION DEGREE INSPECTION DEVICE AND DEFECT CONCENTRATION DEGREE INSPECTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a defect concentration degree inspection device and a concentration degree inspection program capable of judging whether four or more detection subject points including a display defect which are scattered in an inspection subject such as a flat display panel and the like are packed in a reference circle of a predetermined diameter in a speedy and accurate manner.;SOLUTION: The defect concentration degree inspection device includes a detection part 1A for detecting coordinate positions (X₁, Y₁) to (X_X, Y_Y) of the detection subject points P_X to P_Y scattered in the inspection subjects 2 and a calculation processing part 7a for judging the concentration degree of each detection subject position P_X to P_Y by creating a point information table T of each detection subject position P_X to P_Y by using the detected coordinate positions (X₁, Y₁) to (X_X, Y_Y). In addition, the calculation processing part 7a has functions for extracting a set of four detection subject points P₁ to P₄ from the point information table T, for confirming that all distances D₁ to D₆ between points are equal to or shorter than a diameter D of the reference circle 8 of concentration judgement about the detection subject points P1 to P4 in each extracted set and making judgement that the set is packed in the reference circle 8 when two points P₁, P₂ in the set are extracted and either of reference circles C₁, C₂ including the two point P₁, P₂ includes all the rest of the points in the set.;COPYRIGHT: (C)2005,JPO&NCIPI