DEFECT CONCENTRATION DEGREE INSPECTION DEVICE AND DEFECT CONCENTRATION DEGREE INSPECTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a defect concentration degree inspection device and a defect concentration degree inspection program capable of judging whether three detection subject points including a display defect which are scattered in an inspection subject such as a flat display panel and the like are packed in a reference circle of a predetermined diameter in a speedy and accurate manner.;SOLUTION: The defect concentration degree inspection device includes a detection part 1A for detecting coordinate position of each detection subject point P scattered in the inspection subjects 2 and a calculation processing part 7a for judging the concentration degree of detection subject points P by creating a point information table T of each detection subject points P₁ to P_N by using the detected coordinate position. The calculate processing part 7a has functions for extracting a set of three detection subject points P from the point information table T and making judgement that the three points are packed in the reference circle 8.;COPYRIGHT: (C)2005,JPO&NCIPI