METHOD OF MANUFACTURING MICRO-FLOW PASSAGE STRUCTURE AND MICRO-FLOW PASSAGE STRUCTURE

摘要

PPROBLEM TO BE SOLVED: To provide a micro-flow passage manufacturing method for forming a very smooth, long and fine groove, without requiring many devices and manufacturing processes, shortening working time, allowing inexpensive manufacture, without increasing using chemicals and waste causing an environmental load, without causing chipping in working, and without requiring heat treatment for removing strain after working. PSOLUTION: A laser beam is generated from a laser beam generator 1, and is condensed by a focus lens 2, and is transmitted to a light transmissive port 3b covered with a transparent body 3a of a nozzle member 3. Water stored in a water storage tank 4 is put under high pressure via a pump 5, jetted from a circular nozzle port 3c of the nozzle member 3a, and injected into a part for forming a groove (m) on a base material G. The laser beam transmitted to the light transmissive port 3b is applied to a part for forming the groove (m) with water flow reaching the base material G from this nozzle port 3c as a waveguide 6 of the laser beam. PCOPYRIGHT: (C)2005,JPO&NCIPI