OPTOELECTRONIC INTEGRATED CIRCUIT MONOLITHICALLY INTEGRATED ON SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To realize an optoelectronic integrated circuit where an optical element, an optical circuit component and an electronic circuit component are integrated monolithically on a semiconductor substrate, by solving the lattice mismatch between the semiconductor substrate and the optical element.;SOLUTION: In the optoelectronic integrated circuit, where an optical element, an optical circuit part and an electronic circuit part are monolithically integrated on a semiconductor substrate, a buffer layer including at least one kind of compound semiconductor selected from among a group, consisting of a I-III-VI compound semiconductor, a II-III-VI compound semiconductor and a II-III-V compound semiconductor, is provided at least in between the optical element and the semiconductor substrate.;COPYRIGHT: (C)2005,JPO&NCIPI