METHOD OF EVALUATING SILICON-BASED THIN FILM FOR SOLAR CELL, AND METHOD FOR MANUFACTURING THE SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To provide a method of evaluating a silicon-based thin film for a solar cell, for analyzing the film quality of the silicon-based thin film formed on a substrate which does not allow infrared rays from passing.;SOLUTION: In the method of evaluating the silicon-based thin film for the solar cell, infrared rays 10 are emitted to an amorphous silicon thin film 3, that is formed on a transparent glass substrate 5, such as soda glass for preventing infrared rays from being transmitted, and is used for the solar cell, and an absorption spectrum 17 of reflected waves reflected by the amorphous silicon-based thin film 3 is analyzed, thus estimating a light-degradation ratio in the amorphous silicon thin film 3.;COPYRIGHT: (C)2005,JPO&NCIPI