SPECTRAL REFLECTANCE MEASURING DEVICE, FILM THICKNESS MEASURING DEVICE AND SPECTRAL REFLECTANCE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To accurately measure the spectral reflectance of an object to be measured based on a plurality of monochromatic images.;SOLUTION: The film thickness measuring device has an imaging part 32 which acquires a plurality of monochromatic images corresponding to a plurality of wavelengths, respectively, and a plurality of reference monochromatic images which indicate a pattern on a reference substrate are acquired by the imaging part 32. In a correction coefficient setting part 51, the setting of a plurality of correction coefficients depending on a distance from a specific pixel is performed using the plurality of reference monochromatic images. Sequentially, a plurality of monochromatic images to be measured which indicate a pattern on a target substrate are acquired by the imaging part 32, and the value for the specific pixel is corrected, for each of the plurality of monochromatic images to be measured, using the value for the specific pixel and values for pixels around the specific pixel as well as the plurality of correction coefficient. In this way, the reflectance at a measuring point on the target substrate corresponding to the specific pixel can be accurately obtained based on the corrected value for the specific pixel in a spectral reflectance calculating part 52.;COPYRIGHT: (C)2005,JPO&NCIPI