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ALIGNMENT EQUIPMENT AND METHOD, CARRYING SYSTEM AND METHOD, OPTICAL LITHOGRAPHY SYSTEM AND METHOD, AND PROCESS FOR FABRICATING DEVICE
ALIGNMENT EQUIPMENT AND METHOD, CARRYING SYSTEM AND METHOD, OPTICAL LITHOGRAPHY SYSTEM AND METHOD, AND PROCESS FOR FABRICATING DEVICE
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机译:对准设备和方法,传送系统和方法,光学光刻系统和方法以及制造设备的过程
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摘要
PROBLEM TO BE SOLVED: To control the temperature of a substrate without increasing the size or lowering the throughput of the equipment.;SOLUTION: The alignment equipment for setting a substrate W in a predetermined rotational state comprises a first detection means 21 for detecting the rotational state of the substrate W, a rotary means 18 rotatable about a predetermined point while mounting the substrate W and setting the substrate W in a predetermined rotational state based on the detection results from the first detection means 21, and a first temperature control means for controlling the temperature of the substrate W.;COPYRIGHT: (C)2006,JPO&NCIPI
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