SIGNAL PROCESSING DEVICE AND PROCESSING METHOD, ALIGNMENT SYSTEM, ALIGNMENT METHOD, AND LITHOGRAPHY MACHINE

摘要

Provided is a signal processing device having phase compensation, comprising: a signal capturing module (401) used for capturing an actual work signal; a signal emulating module used for emulating a work signal having a certain frequency and amplitude, the signal produced by emulation being defined as a detection signal; a signal processing module (400) selectively connected to the signal capturing module (401) and to the signal emulating module and used for conditioning and sampling a received signal; a phase difference detection module connected respectively to the signal emulating module and to the signal processing module (400) and for detecting the phase difference of the detection signal before and after being processed by the signal processing module (400); and an output control module connected to the phase difference detection module and to the signal processing module (400), for forming a phase difference compensation table, and for phase compensating, on the basis of the phase compensation table, the work signal processed by the signal processing module. Also provided are a signal processing device and a processing method, an alignment module and an alignment method, and a lithography machine; eliminated from signal processing are phase differences produced when different levels of lights are mixed.