MESOPOROUS SILICA THIN FILM, METAL-HAIRLINE-INCLUDING MESOPOROUS SILICA THIN FILMS, AND THEIR PREPARATION METHODS

摘要

PROBLEM TO BE SOLVED: To provide a mesoporous silica thin film excellent in surface smoothness and exhibiting high crystallinity for a long time; and its preparation method.;SOLUTION: The method for preparing a mesoporous silica thin film comprises a partial polymerization step for preparing a liquid containing a silicon alkoxide partial polymer by reacting a silicon alkoxide in an acidic solution, a composite formation step for forming a composite consisting of the silicon alkoxide partial polymer and a surfactant by adding the surfactant to the liquid, and a thin film formation step for forming a mesoporous silica thin film containing the surfactant by forming the liquid containing the composite into a thin film and heating and drying the thin film to react the composite. In the composite formation step, a mixed solvent of water and an alcohol is used as a solvent; the amount of water contained in the mixed solvent is 4-15 mol per 1 mol of the silicon alkoxide; and the alcohol content of the mixed solvent is 65-98 vol.%.;COPYRIGHT: (C)2005,JPO&NCIPI