TUNING FORK AND METHOD FOR MANUFACTURING THE SAME, AND FOCUSING DEVICE, DISPLACEMENT SENSOR, AND CONFOCAL MICROSCOPE USING THE TUNING FORK

摘要

PROBLEM TO BE SOLVED: To provide a high-performance tuning fork with a relatively simple structure and a method for manufacturing the same, and a focusing device, a displacement sensor and a confocal microscope, using the same.;SOLUTION: A plate member 1' has the shape, in which a vibration part 2 extending like a long band and a pair of support parts 3 and 3 provided so as to protrude toward the opposite directions to each other at the central position with respect to the extension direction of the vibration part 2 are integrally provided. The plate member 1' is cut out by scanning one sheet of a soft iron (SPCC) plate with a laser along a cross, for example. The tuning fork 1 is manufactured, by folding the vibration part 2 at the center of the connection part with the support parts 3 and 3 so that the tips of both free ends 2A and 2A are directed in the same direction.;COPYRIGHT: (C)2005,JPO&NCIPI