A PAIR OF TWEEZERS, MANIPULATOR SYSTEM HAVING THE SAME, AND TWEEZERS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pair of tweezers capable of holding a sample for observation by an electron microscope and easily detecting the holding force with high accuracy, and a holding force control device.;SOLUTION: The pair of tweezers have a pair of bar-shaped holding members 31 and 32 having holding faces 31a and 32a formed of a semi-conductor material to hold a sample on tips on the facing sides, and strain sensors 33 and 34 in which the electric characteristic thereof is changed according to the characteristic of the semi-conductor material are built in one of the bar-shaped holding members 31 and 32. The control device controls the holding force based on the detected force.;COPYRIGHT: (C)2005,JPO&NCIPI