PATH-MATCHING PATH INTERFEROMETER DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce an influence of dispersion generated when an irradiation light flux is transmitted through the specimen inside by arranging a dispersion compensation plate on a detour path of a path-matching path part, and to heighten contrast of an interference fringe acquired even when the thickness of the specimen is large.;SOLUTION: The dispersion compensation plate 35 is inserted and arranged on the first path of the path-matching path part 4 when performing measurement using transmitted light through the specimen 20 as inspection light. The first path is a passing optical path of reference light reflected by a reference surface 19a of a transmission type reference plate 19, and the influence of dispersion generated when the inspection light is transmitted through the specimen 20 is reduced by inserting and arranging the dispersion compensation plate 35.;COPYRIGHT: (C)2006,JPO&NCIPI