METHOD FOR DETECTING TYPE OF SMALL AMOUNT OF GAS BY EMISSION SPECTROSCOPY

摘要

PROBLEM TO BE SOLVED: To certainly, rapidly and inexpensively obtain the index related to the concentration value and the change of the type of gas present in small amount and difficult to excite in a gas mixture to be investigated, without using expensive and bulky machineries which are difficult to operate.;SOLUTION: In the method for detecting the type of a small amount of the gas in a mixture by emission spectroscopy using an optical spectrometer, and an apparatus therefor, the light emitted from the plasma 4 present in the gaseous mixture to be analyzed is used and, in the spectrum of light, the line of the amount of a large amount of the gas showing the amplitude responding line is discriminated for estimating the data related to the concentration of a small amount of the gas, is estimated from the amplitude of the response line. By using this constitution, the kind of a small amount of the gas is monitored in a real time.;COPYRIGHT: (C)2005,JPO&NCIPI