Investigation of 50 Hz Pulsed DC Nitrogen Plasma with Active Screen Cage by Trace Rare Gas Optical Emission Spectroscopy

摘要

Optical emission spectroscopy is used to investigate the nitrogen-hydrogen with trace rare gas(4% Ar) plasma generated by 50 Hz pulsed DC discharges.The filling pressure varies from1 mbar to 5 mbar and the current density ranges from 1 mA·cm-2to 4 mA·cm-2.The hydrogen concentration in the mixture plasma varies from 0% to 80%,with the objective of identifying the optimum pressure,current density and hydrogen concentration for active species([N] and [N2])generation.It is observed that in an N2-H2gas mixture,the concentration of N atom density decreases with filling pressure and increases with current density,with other parameters of the discharge kept unchanged.The maximum concentrations of active species were found for 40% H2in the mixture at 3 mbar pressure and current density of 4 mA·cm-2.