METHOD FOR MEASURING FITTING POSITIONS OF SEMICONDUCTOR DEVICE AND SUBSTRATE FOR ELECTRO-OPTICAL DEVICE, SUBSTRATE FOR ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE, ELECTRONIC EQUIPMENT, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain a method for measuring fitting positions of a semiconductor device and a panel, permitting to measure a positional deviation of the semiconductor device fitted on the panel by a simple constitution.;SOLUTION: This is the method for measuring fitting positions of the semiconductor device and the panel, comprising the semiconductor device having measuring bumps 32x which are linearly arranged at equal intervals, and a panel provided with a reference mark 11a at the position where the center axis P1 of a bump 32a as a reference among the bumps 32x for measurement, and arranged with an alignment mark 11x from this mark 11a according to a predetermined rule, which installs the semiconductor device on the panel and measures positional deviation of the semiconductor device in the fitting surface of the panel, a deviation of the reference bump 32a from the reference mark 11a is calculated according to the number of alignment marks 11x existing between the mark in the bump of which the center axis P2 of the mark 11a coincides with the center axis P1 and the reference mark 11a.;COPYRIGHT: (C)2005,JPO&NCIPI