POSITION COORDINATE MEASUREMENT METHOD, OPTICAL CHARACTERISTIC MEASUREMENT METHOD, OPTICAL CHARACTERISTIC MEASURING APPARATUS, METHOD FOR MANUFACTURING PROJECTION OPTICAL SYSTEM, PROJECTION OPTICAL SYSTEM, AND PROJECTION ALIGNER

摘要

PROBLEM TO BE SOLVED: To provide a position coordinates measurement method for measuring position coordinates precisely even if an optical system is rotated and moved when measuring the position coordinates of the optical system.;SOLUTION: The position coordinate measurement method for measuring position coordinates in the optical system having an intermediate imaging plane comprises a process for acquiring the image of a mark inserted into the intermediate imaging plane, and a process for calculating the position coordinates of the optical system on the basis of the image of the mark.;COPYRIGHT: (C)2005,JPO&NCIPI