APPARATUS AND METHOD FOR MEASURING AMOUNT OF PHASE SHIFT AND METHOD OF MANUFACTURING PHASE SHIFT MASK

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for measuring the amount of phase shift allowing precise measurement of the amount of phase shift.;SOLUTION: The apparatus for measuring the amount of phase shift comprises a light source 11, a grating 15 which generates diffracted light, a lens 13b which superposes diffracted light 40a, 40b and allows them to enter a PSM 16, a beam splitter 25a which splits light passed through the PSM 16 into a first beam 41a and a second beam 42b, an optical wedge 28 which provides the two beams with a phase difference, an optical shearing member 26 which displaces the two beams laterally, a beam splitter 25b which generates interfered light by superposing the two beams, and a detector 30 which detects the interfered light 42. The detector 30 detects the light intensity of the interfered light at two detection points simultaneously, and measures the amount of phase shift ϕ of a phase shifter based on the phase difference of the light intensity.;COPYRIGHT: (C)2005,JPO&NCIPI