COLD CATHODE, AND ELECTRON SOURCE AND ELECTRON BEAM APPARATUS USING THE COLD CATHODE

摘要

PROBLEM TO BE SOLVED: To provide a cold cathode capable of conducting electron emission in low vacuum and at low voltage and stably generating the electron emission with uniformity and high density for a long time, and to provide an electron source and an electron beam apparatus using the cold cathode.;SOLUTION: The cold cathode is characterized by an emitter composed of a plurality of conductive nanotubes formed at a tip of a metal needle. The electron source comprises an insulation substrate; two pieces of conductive rods provided penetratingly to the substrate; a filament connected to the rods; and the cold cathode formed at the filament.;COPYRIGHT: (C)2005,JPO&NCIPI