METHOD OF MANUFACTURING COLD CATHODE ELECTRON SOURCE, AND COLD CATHODE ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a cold cathode electron source capable of processing a certain extent of area at a time with a simple process.;SOLUTION: In the manufacturing method, a cathode electrode 2, an insulation layer 4 and a gate electrode 5 are laminated on a substrate 1, polymers A, B which are not dissolved with each other are dissolved in a solvent and coated on a surface of the gate electrode. The solvent is made to be evaporated to have polymer A deposited in fine particle shapes in the polymer B and fixed, the polymer A is removed by developer to form an etching hole 9, then a hole 6 is formed on the gate electrode by etching. Further, a hole is formed on the insulation layer through etching from the hole 6 to have a cold cathode electron source 10 by forming an emitter in the hole.;COPYRIGHT: (C)2011,JPO&INPIT