FILM THICKNESS MEASURING DEVICE FOR COAT LAYER OF THIN-FILM COATED FINE POWDER, AND THE FILM THICKNESS MEASURING DEVICE

摘要

PPROBLEM TO BE SOLVED: To provide a film thickness measuring device for surely and accurately measuring the film thickness of luminous transmissive coat film in an object to be measured forming a luminous transmittable film on fine powder with non-contact and non-destruction, and a film thickness measuring device for executing the same. PSOLUTION: The light from a light source irradiating spectrum light, having a desired wavelength range, is condensed by an objective lens through a microscope optical system limiting a lighting region; the condensed light is made vertically incident on the luminous transmissive coat film; reflected light reflected by the surface of the luminous transmittable coat film, and the surface of the fine powder to be mutually interfered, is returned to the microscope optical system, under the condition that the focus position of the condensed light be brought from the surface of the luminous transmittable coat film to the surface of the fine powder; the reflected light is introduced to a spectral means by a fiber for detected light transmission and then is dispersed by a wavelength width of 300nm or longer, including a visible region. Each wavelength, providing the maximum and minimum of the spectral spectrum intensity and the film thickness of luminous the transmittable coat film are calculated. PCOPYRIGHT: (C)2005,JPO&NCIPI