ALIGNER AND METHOD OF MEASURING MUELLER MATRIX OF OPTICAL SYSTEM OF ALIGNER

摘要

PROBLEM TO BE SOLVED: To measure the Mueller matrix of an optical system included in an aligner, without disassembling the aligner.;SOLUTION: A first polarization conversion device 2 converts a light flux from an optical apparatus 1 to a plurality of polarized lights orthogonal to each other on the Poincare sphere sequentially, and outputs them. These polarized lights are made to pass through a projecting optical system 6 or the like, and an optical detection part 8 detects the light intensity. A plurality of the light intensities are detected, by setting a linear polarizer in a second polarization conversion device 7 to 45×n° ( n Is an integer.) in its azimuthal angle, and switching the insertion and removal of a 1/4 wavelength plate. Stokes parameters for the polarized lights, after the conversion by the projecting optical system 6 or the like are calculated on the basis of resulting data of the plurality of the light intensities, and further the Mueller matrix (M) of the projecting optical system 6 is calculated.;COPYRIGHT: (C)2005,JPO&NCIPI