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Support for the device microelectronics, micromechanics of micro or optoelectronic
Support for the device microelectronics, micromechanics of micro or optoelectronic
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机译:支持设备微电子,微电子或光电子的微机械
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摘要
The present invention relates to a support for the manufacture of microelectronics devices, of micromechanics or micro-opto-electronics. The support; (10 60), a substrate having a function of backing element; comprises a (11 61), on which deposits a separate gas-absorbing material (13, 13 ', ...; 63, 63', ... is deposited in the form of) the deposit, the support (10; exposed at least partially to the atmosphere that exists around 60).
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