Electron beam tilt measurement method and slope calibration method and electron beam proximity exposure apparatus in electron beam proximity exposure apparatus

摘要

PPROBLEM TO BE SOLVED: To calibrate an electron beam to perform scanning with its attitude held in parallel with the optical axis in the electron beam scanning of a whole mask surface in an electron beam proximity exposure system. PSOLUTION: The inclination of an electron beam 15 is measured by using an electron beam inclination sensor 70 comprising a stencil mask 70A with a specified pattern formed thereon and an image sensor 70B positioned away from the stencil mask 70A by a specified distance. From the inclination thus measured, an inclination correcting value is determined for use in zeroing the inclination of the electron beam 15, and calibration is performed for the electron beam 15 to be in parallel with the optical axis irrespective of where the electron beam 15 scans. PCOPYRIGHT: (C)2004,JPO