In the micro material testing device and pulls the stage section of the dynamic characteristic

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for testing micromaterials and a method for evaluating dynamic characteristics by the same capable of directly and highly accurately measuring and evaluating the dynamic characteristics of the micromaterials as they are in an original shape.;SOLUTION: The apparatus for testing the micromaterials is provided with a micro tensile and compression test mechanism 3. In the mechanism 3, a sample stage part of a scanning probe microscope 2 is provided with both an actuator for loading a micro test piece 1 with tensile or compressive load and a means for detecting load on the micro test piece 1 by the actuator. Microdistortions of the test piece due to the tensile or compressive load are measured through the use of a sample surface observing system of the scanning probe microscope 2.;COPYRIGHT: (C)2003,JPO