The aforementioned array guided wave path grid of the array guided wave path grid which is formed from the array guided wave path which was formed by the mask

摘要

PROBLEM TO BE SOLVED: To adjust the phase of an array waveguide even when there is no space to arrange a mask for phase adjustment at an array waveguide part.;SOLUTION: In the case that a phase error is present at the array waveguide 4, through the mask 9 for the phase adjustment provided with windows 10, 11 and 12 in a length corresponding to the phase error, ultraviolet ray beams are emitted and a refractive index is changed. Since the mask 9 for the phase adjustment is arranged not at the part of the array waveguide 4 but at the part of a slab waveguide 3, the space is not required at the array waveguide part. Also, since a plurality of the windows 10, 11 and 12 are provided, only the part of uniform power beams of the ultraviolet ray beams is emitted through the windows 10, 11 and 12 and the phase error is adjusted with excellent reliability.;COPYRIGHT: (C)2003,JPO