Production manner null of array guided wave path grid device production device and array guided wave path grid

摘要

PROBLEM TO BE SOLVED: To realize the low cost manufacturing by performing alignment with high accuracy and at high speed as to a device and a method manufacturing an array waveguide grid device which is used in an optical communication field.;SOLUTION: In an optical device 111, an optical waveguide 112 for input which is connected to the incident plane of a slab waveguide 114 and an optical waveguide 113 which is connected to the light-emitting surface of a slab waveguide 115 and an array waveguide 116 whose one end is connected to the light-emitting surface and other end is connected to the incident plane are formed on a substrate. The optical fiber component 121 formed on another substrate is held by being opposed to the optical device 111 and a light receiving device 134 is arranged by being opposed to the light-emitting surface of the waveguide 115. A wide-band input light 150 is made incident on the held optical fiber component 121. The optical waveguide 112 and the optical fiber component 121 are aligned by variably adjusting the position and the direction of the component 121 so that the monitor light detected by the light receiving device 134 becomes a prescribed level. Then, since the device 134 is also movingly adjusted, an S/N is increased.;COPYRIGHT: (C)2001,JPO