And the getter material and a method of manufacturing the same for electron tube, getter equipment and electron tube for electron tube using the same

摘要

PROBLEM TO BE SOLVED: To sputter a sufficient amount of getter member to a large size of electron tube stably, and suppress an ion impact following a getter flush essentially for a large size electron tube, a CDT, and the like using an impregnation type cathode. ;SOLUTION: In an electron getter member 1, a getter material 3 including a Ba-Al alloy powder and a Ni powder is filled in a metallic getter container 2. In the Ba-Al alloy powder in the getter material 3, the total content of the carbon, the oxygen, and the nitrogen, is made not more than 0.4wt.%. It is preferable to make the content of the carbon not more than 0.04wt.%, the content of the oxygen not more than 0.35wt.%, and the content of the nitrogen not more than 0.01wt.%, and particularly, it is more favorable to make the content of the carbon not more than 0.02wt.%, and the content of the oxygen not more than 0.10wt.%.;COPYRIGHT: (C)1998,JPO