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Vapor deposition systems having separate portions configured for purging using different materials and methods of operating same
Vapor deposition systems having separate portions configured for purging using different materials and methods of operating same
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机译:具有配置成用于使用不同材料进行吹扫的单独部分的气相沉积系统及其操作方法
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摘要
A vapor deposition system can include a first portion of the vapor deposition system that is configured to be purged using a first material and a second portion that is configured to be purged using a second material. Related methods are also disclosed.
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