首页>
外国专利>
Method for transforming an amorphous silicon layer into a polysilicon layer
Method for transforming an amorphous silicon layer into a polysilicon layer
展开▼
机译:将非晶硅层转变成多晶硅层的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method for transforming an amorphous silicon layer into a polysilicon layer is disclosed. The method includes following steps: providing an amorphous silicon substrate, doping the amorphous silicon substrate with an inert gas atom, and increasing the temperature of the surface of the amorphous silicon substrate by heat treatment or thermal process.
展开▼