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MEMS tunable capacitor based on angular vertical comb drives
MEMS tunable capacitor based on angular vertical comb drives
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机译:基于角垂直梳状驱动器的MEMS可调电容器
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摘要
A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.
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