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Sulfoxide pyrolid(in)one alkanolamine cleaner composition

机译:亚砜吡咯烷酮(链烷醇胺)清洁剂组合物

摘要

The present invention relates to, inter alia, a composition for stripping photoresist from substrates comprising: about 5% to about 50% by weight of an alkyl substituted pyrrolidone, an alkyl substituted piperidone, or a mixture thereof, about 0.2% to about 20% of one or more alkanolamines, and about 50% to about 94% of a sulfoxide, sulfoxone, or mixture thereof. Advantageously, the composition can remove copper from a copper substrate at a rate of less than about 10 Å per minute when the substrate is immersed in the composition which is held at 70° C. for 30 minutes and rotated relative to the composition at about 200 revolutions per minute.
机译:本发明尤其涉及用于从基材剥离光致抗蚀剂的组合物,其包含:约5重量%至约50重量%的烷基取代的吡咯烷酮,烷基取代的哌啶酮或它们的混合物,约0.2%至约20%。包括一种或多种烷醇胺,以及约50%至约94%的亚砜,砜砜或它们的混合物。有利地,当将基底浸入保持在70℃下30分钟的组合物中并相对于该组合​​物旋转约200℃时,该组合物可以以小于约10Å/ min的速率从铜基底上除去铜。每分钟转数。

著录项

  • 公开/公告号US6916772B2

    专利类型

  • 公开/公告日2005-07-12

    原文格式PDF

  • 申请/专利权人 DE-LING ZHOU;ROBERT J. SMALL;

    申请/专利号US20020193185

  • 发明设计人 ROBERT J. SMALL;DE-LING ZHOU;

    申请日2002-07-12

  • 分类号C11D7/50;

  • 国家 US

  • 入库时间 2022-08-21 22:21:23

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