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Method and apparatus for the production of a semiconductor compatible ferromagnetic film
Method and apparatus for the production of a semiconductor compatible ferromagnetic film
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机译:用于生产半导体兼容铁磁膜的方法和设备
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摘要
Films of gallium manganese nitride are grown on a substrate by molecular beam epitaxy using solid source gallium and manganese and a nitrogen plasma. Hydrogen added to the plasma provides improved uniformity to the film which may be useful in spin-based electronics.
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