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Efficient method of dynamic formulation of chamber selections for multiple chamber tools
Efficient method of dynamic formulation of chamber selections for multiple chamber tools
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机译:动态选择多个腔室工具的腔室选择的有效方法
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摘要
A new method to manufacture a product is achieved. The method comprises providing a control system and a process tool. The process tool comprises multiple chambers. The process tool stores a plurality of recipes. The control system comprises a database. A set of chambers and a recipe name are selected based on the database. A recipe body is uploaded from the process tool to the control system based on the recipe name. The recipe body is modified to generate a runtime recipe body that specifies the set of chambers. The runtime recipe body is downloaded from the control system to the process tool. A product is processed in the process tool using the runtime recipe body.
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