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Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device
Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device
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机译:微结构器件,形成微结构器件的方法和形成MEMS器件的方法
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摘要
Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device are described. According to one aspect, a microstructure device includes: a semiconductive substrate; a monolithic microstructure device feature coupled with the semiconductive substrate, and wherein at least a portion of the microstructure device feature is configured to move relative to the semiconductive substrate; and a conductive structure provided directly upon the microstructure device feature.
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