STATIC PRESSURE COMPENSATION OF RESONANT INTEGRATED MICROBEAM SENSORS

摘要

A temperature and static pressure compensated differential pressuresensor includes a semiconductor substrate in which a flexible, pressureresponsive diaphragm is formed. A pressure responsive resonant microbeamis fabricated at the diaphragm periphery. For temperature compensation,a secondary resonant microbeam sensor is fabricated on the substrate at aperipheral location beyond the point of substrate attachment to a pressuretube or other support. For static pressure compensation, another secondaryresonant microbeam can be positioned remote from the diaphragm and at alocation of maximum substrate response to static pressure. A further resonantmicrobeam can be mounted at die diaphragm center to augment the signaldue to diaphragm deflections. Also disclosed is an accelerometer including aproof mass, a rigid rim surrounding the proof mass, and a series of narrow,flexible bridges supporting the proof mass relative to the rim. The bridgesflex responsive to accelerations, thus to allow the proof mass to moverelativeto the rim. At least one of the bridges incorporates a resonant microbeamfor measuring acceleration by virtue of die induced strain from flexure ofits associated bridge. For temperature compensation, a secondary resonantmicrobeam is fabricated along the rim.