METHOD OF MAKING M002 POWDERS, PRODUCTS MADE FROM M002 POWDERS, DEPOSITION OF M002 THIN FILMS, AND METHODS OF USING SUCH MATERIALS

摘要

The invention relates to high purity MoO2 powder by reduction of ammoniummolybdate or molybdenum trioxide using hydrogen as the reducing agent in arotary or boat furnace. Consolidation of the powder by press/sintering, hotpressing, and/or HIP is used to make discs, slabs, or plates, which are usedas sputtering targets. The MoO2 disc, slab, or plate form is sputtered on asubstrate using a suitable sputtering method or other physical means toprovide a thin film having a desired film thickness. The thin films haveproperties such as electrical, optical, surface roughness, and uniformitycomparable or superior to those of indium-tin oxide (ITO) and zinc-doped ITOin terms of transparency, conductivity, work function, uniformity, and surfaceroughness. The MoO2 and MoO2 containing thin films can be used in organiclight-emitting diodes (OLED), liquid crystal display (LCD), plasma displaypanel (PDP), field emission display (FED), thin film solar cell, lowresistivity ohmic contacts, and other electronic and semiconductor devices.