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HIGH THROUGHPUT ORGANOMETALLIC VAPOR PHASE EPITAXY (OMVPE) APPARATUS
HIGH THROUGHPUT ORGANOMETALLIC VAPOR PHASE EPITAXY (OMVPE) APPARATUS
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机译:高通量有机金属相滴定(OMVPE)设备
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摘要
A cold wall reactor (10) having inner (14) and outer (12) walls defining an annular reactor cell (16). A susceptor (52) is rotatably mounted in the cell (16), and received wafers (53) to be treated by gases flowing axially through the cell (16). The outer wall (10) of the reactor is normally cooled, but is heated by a suitable furnace (210) to provide a hot wall reactor when cleaning of the cell (16) is required.
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