RETICLE LOADING APPARATUS WITH CONTAMINATION INSPECTING PART FOR CHECKING CONTAMINATION OF RETICLE SUPPORT BAR IN EXPOSURE EQUIPMENT

摘要

Purpose: the graticule load apparatus in radiation device is arranged to reduce process failure since the loading of a contaminated graticule had previously checked the pollution of a reticle support item, uses the pollution for checking part. Construction: a graticule load apparatus includes a reticle stage, a graticule holding part, a driving link, and checks the pollution of part. Reticle stage (10) includes multiple reticle support items (12) for supporting a graticule. Graticule holding part (20) is for shifting graticule to reticle stage. Driving link (30) is connect with graticule holding part. Driving link is for mobile control graticule to reticle support item. Check that the pollution of part (40) is installed in the side of graticule holding part. It checks a contaminated state of the pollution of part for checking reticle support item, passes through the moving sweep support bars according to graticule holding part.