首页> 外国专利> POSITIVE TYPE PHOTORESIST COMPOSITION FOR MANUFACTURING LCD WHICH FORM FINE RESIST PATTERN WITHOUT DEVIATION IN DIMENSION AND PATTERNING METHOD OF RESIST

POSITIVE TYPE PHOTORESIST COMPOSITION FOR MANUFACTURING LCD WHICH FORM FINE RESIST PATTERN WITHOUT DEVIATION IN DIMENSION AND PATTERNING METHOD OF RESIST

机译:用于制造液晶显示器的正型光致抗蚀剂组合物,其形状没有尺寸偏差,并且具有精细的抗蚀剂形成方法

摘要

PURPOSE: Provided is a positive type photoresist composition for manufacturing system LCDs, which form fine resist patterns over the whole area of a broad substrate without any deviation in dimension. CONSTITUTION: The positive type photoresist composition permits an integrated section and a display section to be formed at the same time on one substrate, wherein the resist coating layer has a B parameter of 0.1-0.6. The photoresist composition comprises a dye capable of absorbing i-line(365nm). Particularly, The photoresist composition comprises: (A) an alkali-soluble resin, (B) a non-benzophenone quinonediazide group-containing compound, and (C) a phenolic hydroxyl group-containing compound having a molecular weight of 1000 or less.
机译:目的:提供一种用于制造系统LCD的正型光致抗蚀剂组合物,其在宽基板的整个区域上形成精细的抗蚀剂图案,而尺寸没有任何偏差。组成:正型光致抗蚀剂组合物允许在一个基板上同时形成集成部分和显示部分,其中抗蚀剂涂层的B参数为0.1-0.6。该光致抗蚀剂组合物包含能够吸收i-线(365nm)的染料。特别地,光致抗蚀剂组合物包含:(A)碱溶性树脂,(B)非二苯甲酮醌二叠氮基的化合物,和(C)分子量为1000以下的含酚羟基的化合物。

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