首页> 外国专利> METHOD AND APPARATUS FOR CRYSTALLIZING SEMICONDUCTOR LAYER TO FORM GRAINS OF DESIRED SURFACE ORIENTATION ON SEMICONDUCTOR LAYER, SEMICONDUCTOR DEVICE, FABRICATING METHOD THEREOF, DISPLAY DEVICE, AND PHASE SHIFTER

METHOD AND APPARATUS FOR CRYSTALLIZING SEMICONDUCTOR LAYER TO FORM GRAINS OF DESIRED SURFACE ORIENTATION ON SEMICONDUCTOR LAYER, SEMICONDUCTOR DEVICE, FABRICATING METHOD THEREOF, DISPLAY DEVICE, AND PHASE SHIFTER

机译:晶化半导体层以形成所需层的方向的方法和装置,在半导体层,半导体器件,其制造方法,显示装置和移相器上形成所需的表面取向

摘要

PURPOSE: A method and an apparatus for crystallizing a semiconductor layer, a semiconductor device, a fabricating method thereof, a display device, and a phase shifter are provided to form a single crystal region of a desired surface orientation on an entire surface or a selected surface irrespective to a large-area amorphous semiconductor layer. CONSTITUTION: A semiconductor layer is formed on one side of a substrate(301). The semiconductor layer includes a crystallization region. A surface of the crystallization region is formed with a grain of a rectangular shape. A crystal orientation of a section perpendicular to the crystallization region is (001) plane . A current direction within the crystal region flows in the (001) plane to operate a semiconductor device.
机译:目的:提供一种用于使半导体层结晶的方法和设备,一种半导体器件,其制造方法,一种显示器件和一个移相器,以在整个表面或选定的表面上形成具有所需表面取向的单晶区。表面与大面积非晶半导体层无关。构成:在衬底(301)的一侧上形成半导体层。半导体层包括结晶区域。结晶区域的表面形成有矩形的晶粒。垂直于结晶区域的截面的晶体取向为(001)面。晶体区域内的电流方向在(001)平面中流动以操作半导体器件。

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