PATTERN INSERTION METHOD USING ALIGNER FOR PERFORMING EASILY ALIGNMENT OPERATION IN PATTERNING PROCESS BY INSERTING ALIGNMENT KEY PATTERN, MONITORING PATTERN, AND DUMMY PATTERN INTO EDGE REGION

摘要

PURPOSE: A pattern insertion method using an aligner is provided to perform easily an alignment operation in a patterning process by inserting an alignment key pattern, a monitoring pattern, and a dummy pattern into an edge region. CONSTITUTION: An alignment key pattern, a monitoring pattern, and a dummy pattern are inserted into an edge region(20) of a wafer. The alignment key pattern, the monitoring pattern, and the dummy pattern are inserted into the edge region of the wafer by using 1x aligner or a 5x stepper. In the insertion process, two or more alignment key patterns, two or more monitoring patterns, and two or more dummy patterns are inserted into the edge region of the wafer.