REFLECTIVE Ag ALLOY FILM FOR REFLECTORS HAVING SUPERIOR SURFACE FLATNESS BY ADDING PROPER AMOUNT OF RARE EARTH ELEMENT AND REFLECTOR USING THE SAME

摘要

PURPOSE: To provide a reflective Ag alloy film for reflectors having superior surface flatness and high reflectivity even under the heating environment, and a reflector using the reflective Ag alloy film having such superior characteristics. CONSTITUTION: The reflective Ag alloy film for reflectors is characterized in that the reflective Ag alloy film has a surface roughness(Ra) of 2.0 nm or less, wherein the reflective Ag alloy film contains 0.1 to 3.0 atom% of a rare earth metal element, wherein the rare earth metal element is Nd, wherein the reflective Ag alloy film contains 0.5 to 5.0 atom% of one or more elements selected from Au, Pd, Cu and Pt, wherein thickness of the reflective Ag alloy film is 50 to 300 nm, and wherein the reflective Ag alloy film is obtained by heating an Ag alloy thin film deposited substrate to a temperature of 50 to 200 deg.C when forming a reflective Ag alloy film. The reflector comprises a substrate, and a reflective Ag alloy film for reflectors that is formed on the substrate, wherein the reflector further comprises a base layer that is formed on the substrate and includes one or more compounds selected from the group consisting of oxide, nitride and oxynitride.