WAFER TRANSFER APPARATUS TO PREVENT SENSITIVITY OF SENSOR FROM BEING DETERIORATED AND MORE PRECISELY DETECT WAFER WHEN WAFER PLACED IN SLOTS FORMED IN CASSETTE IS MAPPED

摘要

Purpose: the susceptibility that a wafer transfer device is arranged to one sensor of prevention, which deteriorates and more accurately detects a chip, works as chip, it is arranged in the slot form in a box, be by a position install a sensor maps when, wherein various byproducts are not pierced on the wafer. Construction: a chip is placed on a placement part (140). The arm (150) and upward stretch out extended from placement part is included in a piece of sword (130). Sword is supported by a support sector. One driver part vertically shifts and rotates support sector. One detection part detects whether that chip is placed in each slot in a box, the first sensor (156) including being mounted on arm.