METHOD OF FABRICATING A TFT ARRAY PANEL TO IMPROVE PRODUCTION EFFICIENCY

摘要

PURPOSE: A method of fabricating a TFT(Thin Film Transistor) array panel is provided to improve production efficiency by preventing display badness such as point defects and display stains from being created. CONSTITUTION: The first metal thin film is formed on an insulation substrate and then patterned so as to form gate wiring and a gate electrode of a TFT. A gate insulation film, an active film and an ohmic contact film are formed and then the active film and the ohmic contact film are patterned by dry etching. The second metal thin film is formed and then patterned so as to form a drain electrode(6) and a source electrode(7). Thereafter, the ohmic contact film is removed by etching. After an interlayer dielectric is formed, the interlayer dielectric and the gate insulation film are patterned so as to form a pixel contact hole(9), the first contact hole and the second contact hole. A transparent conductive film is formed and then patterned so as to form a pixel electrode(11).