首页>
外国专利>
Method of fabricating TFT array panel using aluminum wiring line and TFT array panel using the same method
Method of fabricating TFT array panel using aluminum wiring line and TFT array panel using the same method
展开▼
机译:使用铝布线制造TFT阵列面板的方法和使用相同方法的TFT阵列面板
展开▼
页面导航
摘要
著录项
相似文献
摘要
Multi-layered wiring for a larger flat panel display is formed by depositing molybdenum on a substrate in presence of a precursor gas containing at least one oxygen, nitrogen and carbon to form a molybdenum layer. An aluminum layer is deposited on the molybdenum layer. Another metal layer may be formed on the aluminum layer. The molybdenum layer has a face-centered cubic (FCC) lattice structure with a preferred orientation of (111).
展开▼