PICKER FOR CARRYING MATERIALS OF SEMICONDUCTOR FABRICATING PROCESS TO SHORTEN INTERVAL OF TIME FOR CARRYING MATERIALS AND IMPROVE PRODUCTIVITY OF SEMICONDUCTOR FABRICATING PROCESS

摘要

Purpose: the material that a picker is used to carry a semiconductor strain fabrication schedule is arranged to shorten the period for carrying material and the productivity for improving a semiconductor strain fabrication schedule by including at least two terminal plates, is supported by a picker body can be carried. Construction: a pair of first terminal plate (41) selects a kind of lower part transported material and support to transport material, including once supporting part (41a) during a semiconductor strain fabrication schedule. One picker body (31) supports the first terminal plate can be carried, and is located on the first terminal plate. Second wiring board group (42) includes at least a terminal plate, is picked device main body and supports can be carried.