IN-SITU MICRO-TORQUE MAGNETOMETER SYSTEM CAPABLE OF CONTINUOUSLY MONITORING MAGNETIC CHARACTERISTICS OF DEPOSITED FILMS

摘要

PURPOSE: An in-situ micro-torque magnetometer system is provided to continuously monitor magnetic characteristics of deposited films during a deposition process without breaking vacuum condition. CONSTITUTION: A cantilever chip is deposited by magnetic atoms from a deposition source(10). An interferometer(50) detects vibration of the cantilever chip to output an electric signal. A deposition head(30) includes the cantilever chip and fixes a fiber end of the interferometer to be apart from a surface of the cantilever chip. A high voltage amplifier(70) amplifies a voltage from outside. A piezoelectric material is vibrated by the amplified voltage. A lock-in amplifier(100) detects a signal from the piezoelectric member. A phase locked loop(60) generates a signal having a phase difference of 180 degrees from an input signal of the interferometer and outputs the result to the high voltage amplifier. A power amplifier(80) applies an amplified AC voltage to a coil inside the deposition head. An oscillator(90) monitors the movement of the cantilever chip.