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A BOARD ALIGNMENT DEVICE OF EXPOSER

机译:主板对准曝光装置

摘要

In the present invention the substrate alignment device of the exposure device by the exposure device to transfer a pattern formed on a mask onto a substrate, provided with an alignment hole or the like formed to be continuous in the interval on both ends, and the photosensitive material coated on the surface of a substrate; It is disposed above the movement of the substrate path and a UV lamp for projecting UV light to the photosensitive material; The UV lamp disposed in the lower side and the pattern and the position recognition mark is formed and a photomask; And a projection lens for guiding is arranged between the photo mask and the substrate with UV light into the substrate; Disposed in the lower movement path of the substrate and the alignment holes and the imaging illumination system for irradiating the detection light to maethi on the photomask; It is disposed on the image side of the photomask and the image display unit to observe the position recognition mark and Rimed image on the photo-mask; Which is arranged on the upper side of the illumination system by a detection light emitted from the illumination system is configured to include a refractive lens for refracting the detection light to rapid temperature change in the mask, adjust the index of refraction of visible light to be irradiated from the backlight aligned holes Since the by-pass temperature may cause problems to the image on the photomask maethi the correct viewing position for accurate position determination with this, there is a rapid and advantages that can align the position accurately.
机译:在本发明中,曝光装置的基板对准装置通过曝光装置将掩模上形成的图案转印到在基板上设置有在两端间隔成连续的对准孔等的基板,以及涂覆在基材表面上的材料;它设置在基板路径和紫外线灯上方,用于将紫外线投射到感光材料上。设置在下侧的紫外线灯和图案以及位置识别标记形成并形成光掩模;在光掩模和基板之间设置有用于引导的投影透镜,其中紫外线进入基板。设置在基板的下部移动路径和对准孔以及成像照明系统中,用于将检测光照射到光掩模上。设置在光掩模和图像显示单元的图像侧,以观察光掩模上的位置识别标记和边缘图像。通过从照明系统发射的检测光将其布置在照明系统的上侧,该结构被配置为包括折射透镜,该折射透镜用于使检测光折射到掩模中的快速温度变化,将可见光的折射率调节为从背光源对准孔发出的光由于旁路温度可能会导致光掩模上图像的问题,从而无法正确确定位置,因此存在正确定位的快速和优势。

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