DRAIN OVERFLOW PREVENTION APPARATUS OF CHEMICAL MECHANICAL POLISHER AND PREVENTION METHOD THEREIN

摘要

The present invention is N ₂ in that, more particularly difficult to determine by visual observation of the leak points arising from polisher part of the N ₂ drain overflow (Drain Overflow) protection device and a protection method using a pressure switch to the CMP polisher detects by using a pressure switch to put leak occurs, it is before the order to check the state of the drain portion of the protection that can be achieved the operation reliable equipment through which the removal of the cause of the leakage drain overflow device and a protection method will be.; The present invention, the bottom frame of the robot according to the chemical-mechanical polisher that is installed to drain to the bottom frame and Teflon panel is not fully in contact with each other, there is a discharge tube with nitrogen pressure being supplied to the Teflon panel is provided for this purpose It blocked the bottom drain hole and that detects not to overflow drain to the contact gap in its features.